Critical-dimension atomic force microscopy
= Critical-dimension atomic force microscopy
= CD-AFM
{c}
{synonym}
An AFM approach using calibrated side-sensitive tip geometry and position control to measure steep or reentrant features. A flared tip can reach surfaces that an ordinary tapered probe cannot; calibration must account for its effective width.<Effects of Lateral Tip Control in CD-AFM Width Metrology by Ronald G. Dixson and others>[Flared probes, lateral sensing and effective tip width]{ref}