 Effects of Lateral Tip Control in CD-AFM Width Metrology by Ronald G. Dixson and others (source code)

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= Effects of Lateral Tip Control in CD-AFM Width Metrology by Ronald G. Dixson and others
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{tag=Work by Ronald G. Dixson}
{title2=2014}

https://www.nist.gov/publications/effects-lateral-tip-control-cd-afm-width-metrology[NIST publication record and abstract].

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