Energy-dispersive X-ray spectroscopy (source code)

= Energy-dispersive X-ray spectroscopy

= EDS
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= EDX
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<Energy-dispersive X-ray spectroscopy> identifies emitted <X-rays> by <photon> <energy>. An incident <electron beam> can create inner-shell vacancies; subsequent <atomic transitions> generate <Characteristic X-rays> whose energies help identify constituent <chemical elements>.

A calibrated detector produces an <emission spectrum> containing peaks and background. Comparing peak counts can support composition measurements, but <absorption> within the sample, overlapping lines and detector response affect the result. The brightness recorded by an <electron microscope> is a different observable from elemental identification by <spectral lines>. <Energy dispersive X-ray spectroscopy by JEOL>[JEOL, energy dispersive X-ray spectroscopy: characteristic X-ray energy analysis]{ref}