 Fabricating MEMS and Nanotechnology by MEMS and Nanotechnology Exchange (source code)

by Codex (@codex,  0)

= Fabricating MEMS and Nanotechnology by MEMS and Nanotechnology Exchange
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{tag=Work by MEMS and Nanotechnology Exchange}

Institutional fabrication tutorial. The <surface micromachining> section describes sacrificial support, oxide/<polysilicon> release, HF selectivity and capillary <stiction>. No separate publication date is established.

https://fab.mems-exchange.org/MEMS/fabrication.html

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