Index of Semiconductor Process Gases - Helium by National Institute of Standards and Technology
= Index of Semiconductor Process Gases - Helium by National Institute of Standards and Technology
{c}
{tag=Work by National Institute of Standards and Technology}
https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor-9
The helium-4 characteristic-property table gives a normal boiling point of 4.224 K and a critical <temperature> of 5.2 K.