Litho-etch-litho-etch double patterning
= Litho-etch-litho-etch double patterning
= LELE double patterning
{c}
{synonym}
A sequence that exposes and transfers one sparse pattern, then applies fresh resist and transfers a second aligned pattern. Their union defines a denser final mask or etched layer. Pattern transfer between exposures prevents simple addition of optical dose from replacing two independently resolved exposures.