Metalorganic vapour-phase epitaxy
= Metalorganic vapour-phase epitaxy
{wiki}
= Metal-organic vapour-phase epitaxy
{synonym}
= MOVPE
{c}
{synonym}
= Metalorganic chemical vapor deposition
{synonym}
= MOCVD
{c}
{synonym}
Epitaxial growth using volatile metal-organic precursors delivered in the gas phase. Precursor decomposition and surface incorporation grow a crystalline compound layer or nanostructure; <temperature> and <mass> transport influence composition.