Solution (source code)

= Solution

\b[Use <electron> lenses and a digitally scanned, blanked <electron> beam; no physical mask is required for direct writing.] Electromagnetic lenses focus the charged-particle beam, deflectors place it, and the pattern generator controls position and dose. Electrostatic elements can also form part of <electron> optics, but these are not refractive glass lenses.

The <extreme ultraviolet> mask mentioned in the problem is the object being manufactured by this maskless write process, rather than a mask placed in the <electron> path.