Scanning capacitance microscopy
= Scanning capacitance microscopy
= SCM
{c}
{synonym}
Scanning-probe mapping of local <capacitance> response. Conventional <semiconductor> dopant profiling measures a bias-modulated $dC/dV$ signal involving an insulating layer and a changing <semiconductor> depletion region; an electrically isolated conducting flake on <glass> is not automatically that device geometry.