= Semiconductor device fabrication
<Semiconductor device fabrication> builds electronic or optoelectronic structures by controlling the geometry, composition and interfaces of <semiconductor> materials. Typical steps include deposition, <photolithography>, <etching> and controlled <semiconductor doping>. Repeating patterned steps creates devices and their interconnections.
For a simple patterned layer, deposit material, coat it with <photoresist>, expose through a <photomask>, develop the resist and transfer the pattern by <etching>. Later layers require alignment to earlier ones. A useful device depends on more than resolving a small feature: defects, contamination, interface quality and electrical contact resistance also affect performance. Fabrication therefore couples <materials science> with measurement and process control.<Glossary of Lithography Terms by Chris A. Mack>[Photolithography, Photoresist and Patterning]{ref}
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