Published in Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II.
Publisher: SPIE, Bellingham, WA.
Published in Proceedings of SPIE, volume 5878, article 58781B (proceedings series, not treated as the parent title).
Cited passages: §2 and Fig. 1, pp. 2–3: apparatus; §3.2 and Figs. 4–5, pp. 4–5: bead-size comparison and limitations.