= Angle-resolved low-coherence interferometry
{wiki=Angle-resolved_low-coherence_interferometry}
Angle-resolved low-coherence interferometry (AR-LCI) is an advanced optical technique used to measure the thickness and other properties of thin films, surfaces, and layered structures with high spatial resolution. The method combines principles from low-coherence interferometry with angle-resolved detection, allowing for detailed analysis of materials at microscopic and nanoscale levels.
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