= Residual gas analyzer
{wiki=Residual_gas_analyzer}
A Residual Gas Analyzer (RGA) is an analytical instrument used to identify and measure the composition of gases present in a vacuum environment. It is commonly employed in various scientific and industrial applications, including vacuum processing, semiconductor manufacturing, surface analysis, and material characterization. \#\#\# Key Features of Residual Gas Analyzers: 1. **Detection Principle:** RGAs typically use mass spectrometry as their detection method.
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