= RF antenna ion source
{wiki=RF_antenna_ion_source}
An RF (radio frequency) antenna ion source is a type of ion source that utilizes radio frequency energy to generate ions. These ion sources are commonly used in various applications in fields such as mass spectrometry, semiconductor manufacturing, and plasma processing. \#\#\# How RF Antenna Ion Sources Work: 1. **RF Power Generation**: The RF antenna ion source operates by generating an oscillating electromagnetic field through the use of an RF power generator. This RF energy is transmitted via an antenna or coil.
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