Source: wikibot/rutherford-backscattering-spectrometry
= Rutherford backscattering spectrometry
{wiki=Rutherford_backscattering_spectrometry}
Rutherford Backscattering Spectrometry (RBS) is a powerful analytical technique used to determine the composition and thickness of thin films and layers of materials. It is based on the principles of nuclear physics and involves bombarding a sample with high-energy ions, typically helium ions (alpha particles), which are directed at the material under investigation.