Source: wikibot/surface-micromachining
= Surface micromachining
{wiki=Surface_micromachining}
Surface micromachining is a technology used to create microstructures and devices on the surface of a substrate, typically silicon, by depositing and etching thin films to form three-dimensional structures. It is one of the key techniques in microfabrication and is widely used in the production of microelectromechanical systems (MEMS), sensors, actuators, and other miniaturized devices.