= Thermal scanning probe lithography
{wiki=Thermal_scanning_probe_lithography}
Thermal scanning probe lithography (tSPL) is a specialized nanofabrication technique that combines scanning probe microscopy with thermal processes to create nanostructures on a substrate. This technique typically involves a sharp tip, similar to that used in atomic force microscopy (AFM), which is heated to a temperature sufficient to induce changes in the material it contacts, such as polymers or other thermally responsive materials.
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