A Liquid Metal Ion Source (LMIS) is a type of ion source used primarily in various applications such as mass spectrometry, focused ion beam (FIB) systems, and ion implantation. The LMIS generates ions by the field evaporation or field ionization of a liquid metal that is contained in a small source chamber.

Ancestors (6)

  1. Ion source
  2. Accelerator physics
  3. Applied and interdisciplinary physics
  4. Subfields of physics
  5. Physics
  6. Home

View article source

Discussion (0)

New discussion

There are no discussions about this article yet.

Articles by others on the same topic (0)

There are currently no matching articles.
See all articles in the same topic Create my own version