MEMS stands for Micro-Electro-Mechanical Systems. It refers to a technology that integrates mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication techniques. The result is a miniature device or system that can perform various functions such as sensing, actuation, and control. MEMS devices are characterized by their small size (often in the micrometer range) and the ability to operate with high precision and efficiency.
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