Plasma-immersion ion implantation

Plasma-immersion ion implantation (PIII) is a materials processing technique used to modify the surface properties of materials, typically to enhance their wear resistance, corrosion resistance, or other functional attributes. It combines ion implantation and plasma processing to achieve these enhancements. ### Key Components of PIII: 1. **Plasma Generation**: PIII begins with the creation of a low-pressure plasma, typically using gases such as argon, nitrogen, carbon, or specific precursor gases.