Thermochemical nanolithography is a specialized nanofabrication technique used to create nanostructures with high precision. It combines thermal and chemical processes to pattern materials on a nanoscale. ### Key Aspects of Thermochemical Nanolithography: 1. **Temperature Control**: The process typically involves a scanning probe that applies localized heat to a surface. This localized heating can cause specific chemical reactions or changes in the material beneath the probe.
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