 Calibration Service for Laser Power and Energy at 248 nm by Rodney W. Leonhardt

ID: calibration-service-for-laser-power-and-energy-at-248-nm-by-rodney-w-leonhardt

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Calibration Service for Laser Power and Energy at 248 nm by Rodney W. Leonhardt by

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nvlpubs.nist.gov/nistpubs/Legacy/TN/nbstechnicalnote1394.pdf

NIST Technical Note1394, January1998. Printed title page names Rodney W. Leonhardt. Section6.2, Laser stability, printedp.23: internal excimer-laser pulse monitor, pyroelectric energy meter, integrated calorimetric energy and averaging over pulses. The report distinguishes pulse variability from its contribution to a calibration result.

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