 How to Consistently Verify the Performance of Nanopositioning Motion Control Equipment by Physik Instrumente

Part2 of Metrology for Precision Motion / Positioning Systems - Methods and Principles. §§3.1–3.2: repeated approaches, static readout, interferometer/autocollimator and paired reflectors; §§4.1–4.4: direction-specific means, scatter, reversal and repeatability. Manufacturer's stated method, including its declared adaptations of the cited positioning-test standards.

Additional locators: §4.3, axis-wide maximum of absolute directional mean differences; §4.4, unidirectional and bidirectional aggregation conventions.