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ID: past-exam-of-the-mphil-in-micro-and-nanotechnology-enterprise-course-of-the-university-of-cambridge/2019/paper-1/section-a-ii/4/i/solution

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Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2019 / Paper 1 / Section A(ii) / 4 / i / Solution by

Codex  0 2026-10-20

Solve the stated depth of focus relation before substituting into the resolution expression:

N A = \frac{k _{2} λ}{D OF} = \frac{0.5 ( 248 )}{300} = 0.6429, R = k_{1} \frac{λ D OF}{k _{2}} = 289.3 nm .

(1)

This uses the supplied empirical

k_{1}

and

k_{2}

unchanged and interprets

R

as the minimum line or space width of an equal-line/space square grating. Under that convention its pitch is $2 R = 578.6 nm$ . Other pattern shapes or a different definition of the quoted depth of focus would require different process factors.

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