A researcher in nanoscale metrology who coauthored studies of width measurements with atomic force microscopy. A shaped probe senses steep sidewalls, but its lateral motion changes the effective width that must be subtracted from a measurement. The work examined calibration under matched conditions, showing why a microscope's control method is part of the measurement model.[ref]
Effects of Lateral Tip Control in CD-AFM Width Metrology by Ronald G. Dixson and others. NIST abstract: flared tips, lateral dither, effective width and calibration conditions
New to topics? Read the docs here!