Video 1. Carl Zeiss, Explained by Asianometry (2021) Source.
Video 2. How Carl Zeiss Crafts Optics for a $150 Million EUV Machine. Source. Difficulty: light at those frequencies get absorbed by lenses. So you have to use mirrors instead.
Subsidiary of Carl Zeiss AG and also part owned by ASML, sole optics vendor of ASML as of 2020.