 EUV Lithography—The Successor to Optical Lithography? by John Ernst Bjorkholm (source code)

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= EUV Lithography—The Successor to Optical Lithography? by John Ernst Bjorkholm
{c}
{tag=Work by John Ernst Bjorkholm}
{title2=1998}

Intel Technology Journal Q3 1998. Author’s Biography, article p. 8.

https://www.intel.com/content/dam/www/public/us/en/documents/research/1998-vol02-iss-3-intel-technology-journal.pdf

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