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EUV Lithography—The Successor to Optical Lithography? by John Ernst Bjorkholm
(1998)
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Physics bibliography
Electromagnetism and optics bibliography
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2026-10-18
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2026-11-05
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Work by John Ernst Bjorkholm
Intel
Technology
Journal Q3 1998. Author’s
Biography
,
article
p
.
8
.
www.intel.com/content/dam/www/public/us/en/documents/research/1998-vol02-iss-3-intel-technology-journal.pdf
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Electromagnetism and optics bibliography
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