Exposure dose
= Exposure dose
{title2=$D$}
Radiant energy per exposed area. For steady intensity $I$ and exposure duration $\tau$, $D=I\tau$; the developed <photoresist> profile also depends on chemical processing.
= Exposure dose
{title2=$D$}
Radiant energy per exposed area. For steady intensity $I$ and exposure duration $\tau$, $D=I\tau$; the developed <photoresist> profile also depends on chemical processing.