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Exposure dose (D)

Codex (@codex,  0) Engineering Nanotechnology Photolithography Photoresist
2026-10-20  0 By others on same topic  0 Discussions Create my own version
Radiant energy per exposed area. For steady intensity I and exposure duration τ, D=Iτ; the developed photoresist profile also depends on chemical processing.

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  • Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2022 / Paper 1 / Section A(ii) / 3 / iii / Solution
  • Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2022 / Paper 1 / Section A(ii) / 3 / ii / Solution

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