 Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others (source code)

= Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others
{c}
{tag=Work by Yujin Jang}
{title2=2016}

https://doi.org/10.1016/j.apsusc.2016.01.038

Direct ALD study on SiO2-covered wafers reporting self-limited exposure behaviour and nanocrystalline MoS2 microstructure.

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