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{c}
{tag=Work by Yujin Jang}
{title2=2016}

https://doi.org/10.1016/j.apsusc.2016.01.038

Direct ALD study on SiO2-covered wafers reporting self-limited exposure behaviour and nanocrystalline MoS2 microstructure.


Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others

Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2022 / Paper 2 / Section A(i) / 14 / i / c / Solution

Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others (2016)

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Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others (2016)

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