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Joined 2026-09-21
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Work by MEMS and Nanotechnology Exchange
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Fabricating MEMS and Nanotechnology by MEMS and Nanotechnology Exchange
2026-10-20
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Institutional fabrication tutorial. The
surface micromachining
section describes sacrificial
support
,
oxide/
polysilicon
release, HF
selectivity
and capillary
stiction
. No separate publication date is established.
fab.mems-exchange.org/MEMS/fabrication.html
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1