The term "1.5 µm process" refers to a specific semiconductor fabrication technology node where the smallest features that can be reliably created on a silicon wafer are approximately 1.5 micrometers (µm) in size. This metric defines the minimum half-pitch of contactable features in integrated circuits (ICs), such as transistors, interconnects, and other components. ### Context and Significance: 1. **Technology Node**: The "1.
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