Surface micromachining

ID: surface-micromachining

Surface micromachining is a technology used to create microstructures and devices on the surface of a substrate, typically silicon, by depositing and etching thin films to form three-dimensional structures. It is one of the key techniques in microfabrication and is widely used in the production of microelectromechanical systems (MEMS), sensors, actuators, and other miniaturized devices.

New to topics? Read the docs here!