MEMS (Micro-Electro-Mechanical Systems) sensors are classified into different generations based on their technological advancements and applications. While the classification can vary slightly depending on the source, the MEMS sensor generations generally reflect the evolution in design, fabrication, and integration technologies. Here’s an overview of the generations: ### Generation 1: Early MEMS Sensors - **Development Period:** 1980s to early 1990s - **Characteristics:** - Basic structures and functions.
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