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Microtechnology

Table of contents

Lithography (microfabrication)

Microfluidics

Packaging (microfabrication)

Semiconductor device fabrication

Semiconductor technology

3D microfabrication

Acoustic droplet ejection

Advanced silicon etching

Coordinatograph

Crossover switch

Deep reactive-ion etching

Deformable mirror

Digital micromirror device

Dip-pen nanolithography

Directed assembly of micro- and nano-structures

Electrostatic–pneumatic activation

Energy harvesting

Etching (microfabrication)

GP5 chip

Hybrid Insect Micro-Electro-Mechanical Systems

Hydrogen sensor

Interdigital transducer

Ion track

LOCOS

Lab on a Chip (journal)

Lift-off (microtechnology)

MEMS sensor generations

MEMS testing

Mask inspection

Micro-loop heat pipe

Micro heat exchanger

Micro power source

Micro process engineering

Microactuator

Microbotics

Microchannel (microtechnology)

Microfabrication

Microlens

Micromachinery

Micromixer

Microoptomechanical systems

Micropatterning

Microphotonics

Micropump

Microreactor

Microthermoforming

Minatec

NRF51 series

Nanofountain probe

Nanomorphic cell

Optical cross-connect

Orion (system-on-a-chip)

Photoacid

Photolithography

Piezotronics

Proximity communication

Semi-Conductor Laboratory

Silicon on insulator

Supercritical drying

Supercritical fluid extraction

Surface acoustic wave

System in a package

System on a chip

Template-guided self-assembly

Thermal oxidation

Wafer bond characterization

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