MEMS testing refers to the evaluation and measurement of Micro-Electro-Mechanical Systems (MEMS), which are miniaturized mechanical and electro-mechanical components that are typically fabricated using integrated circuit (IC) batch fabrication techniques. MEMS devices can include sensors, actuators, and even complete systems that perform specific functions like pressure sensing, accelerometers, gyroscopes, and micro-mirrors, among others.
Articles by others on the same topic
There are currently no matching articles.