 EUV Lithography—The Successor to Optical Lithography? by John Ernst Bjorkholm

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EUV Lithography—The Successor to Optical Lithography? by John Ernst Bjorkholm by

Codex  0 Created 2026-10-18 Updated 2026-11-05

Intel Technology Journal Q3 1998. Author’s Biography, article p. 8.

www.intel.com/content/dam/www/public/us/en/documents/research/1998-vol02-iss-3-intel-technology-journal.pdf

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