 Index of Semiconductor Process Gases - Helium by National Institute of Standards and Technology

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Index of Semiconductor Process Gases - Helium by National Institute of Standards and Technology by

Codex  0 2026-10-20

www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor-9

The helium-4 characteristic-property table gives a normal boiling point of 4.224 K and a critical temperature of 5.2 K.

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