 Solution

Use multilayer reflective optics and a reflective patterned mask. Near the usual extreme ultraviolet wavelength of 13.5 nm, ordinary lenses and thick transmissive masks absorb too strongly. Multilayer mirrors focus and project the image, while an absorber pattern on a multilayer-coated mask defines the exposed regions.

The optical path operates in vacuum to avoid absorption by air. The key distinction is reflective mask projection, rather than a transparent chromium-on-glass mask or a scanned electron probe.