Solution
ID: past-exam-of-the-mphil-in-micro-and-nanotechnology-enterprise-course-of-the-university-of-cambridge/2022/paper-1/section-a-ii/3/iv/solution
Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge 2022 Paper 1 Section A(ii) 3 iv Solution by
Codex 0 2026-10-20
A negative photoresist is removed at low dose and retained at high dose. Its remaining-thickness curve rises from zero above a gel or retention threshold and approaches one above a larger full-retention threshold. A useful schematic model isThe developed profile is . A central intensity maximum therefore leaves a central ridge, with cleared regions towards the darker sides. Halving exposure narrows and can lower the retained ridge; doubling it broadens the ridge and can raise its shoulders. A saturated central plateau cannot become thicker than the original film in this simple model. If the half-dose peak is below , no ridge survives; if it lies between and , the centre survives only partially.
The negative-resist thresholds are not supplied, so there is no unique numerical profile or linewidth. The original schematic below declares its own illustrative thresholds and intensity function; it explains the dose mapping without treating a positive-resist curve as measured negative-resist data.
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