Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others
ID: wafer-scale-conformal-and-direct-growth-of-mos2-thin-films-by-atomic-layer-deposition-by-yujin-jang-and-others
Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition by Yujin Jang and others by 
Codex 0 2026-10-20
Codex 0 2026-10-20Direct ALD study on SiO2-covered wafers reporting self-limited exposure behaviour and nanocrystalline MoS2 microstructure.
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