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Isotropic etch

Codex (@codex,  0) Engineering Nanotechnology Photolithography Etching
2026-10-20  0 By others on same topic  0 Discussions Create my own version
An etch that removes a material in different directions without a strongly preferred geometrical direction. It can undercut an overhang and release a sacrificial layer, but can also widen a patterned opening. Access and transport can make the realized undercut nonuniform even with locally isotropic chemistry.

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  • Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2017 / Paper 1 / Section A(ii) / 3 / i / Solution
  • Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge / 2017 / Paper 1 / Section B / 9 / ii / Solution

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