Approximate each source as localized, keep the angular factors unchanged and use inverse-square flux dilution. The increased distance gives
(1)
This carries the composition/thickness convention of the previous answer. A greater source distance reduces fractional distance and angle variation across a given substrate, improving composition uniformity at the cost of rate. A real magnetron sputtering target is extended, with an angular emission distribution, and gas scattering can change the distance law; this is an estimate rather than a calibrated prediction.

Ancestors (10)

  1. 4
  2. Section A(ii)
  3. Paper 1
  4. 2017
  5. Past exam of the MPhil in micro- and nanotechnology enterprise course of the University of Cambridge
  6. MPhil in micro- and nanotechnology enterprise course of the University of Cambridge
  7. Course of the University of Cambridge
  8. University of Cambridge
  9. List of universities
  10. Home

View article source

Discussion (0)

New discussion

There are no discussions about this article yet.

Articles by others on the same topic (0)

There are currently no matching articles.
See all articles in the same topic Create my own version