Lateral oscillation or dithering is added to the vertical oscillation. It provides a tip-sidewall interaction signal that can drive lateral feedback while the vertical channel maintains height control. This is how a suitable flared tip can track steep or reentrant walls. Treating the additional signal as merely a larger vertical tapping amplitude would not supply the required sidewall sensing.[ref]
Effects of Lateral Tip Control in CD-AFM Width Metrology by Ronald G. Dixson and others. Lateral-dither contribution to the effective tip envelope
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