Original 1931 experiment by Raman and Bhagavantam: dspace.rri.res.in/bitstream/2289/2123/1/1931%20IJP%20V6%20p353.pdf
You can't get more direct than this in terms of proving that photons exist!
The particular case of the double-slit experiment will be discussed at: single particle double slit experiment.
Production:
Detectors are generally called photomultipliers:
Bibliography:
- iopscience.iop.org/book/978-0-7503-3063-3.pdf Quantum Mechanics in the Single Photon Laboratory by Waseem, Ilahi and Anwar (2020)