Computational lithography

Computational lithography is a technology used in semiconductor manufacturing that leverages advanced computational techniques to improve the resolution and fidelity of patterns printed onto semiconductor wafers. As the feature sizes of semiconductor devices continue to shrink, traditional optical lithography methods face limitations in accurately transferring designs onto silicon. Key aspects of computational lithography include: 1. **Inverse Lithography Technology (ILT):** This involves optimizing the mask design through computational algorithms to achieve the desired pattern on the wafer.