 Microelectromechanical system

A microelectromechanical system combines small mechanical structures with electrical sensing or actuation. Fabrication methods related to semiconductor device fabrication can create suspended beams, membranes and movable masses together with their electrodes. Sensors and actuators can consequently be integrated into compact devices.

A capacitive accelerometer illustrates the mechanism. A suspended proof mass moves relative to its support under acceleration. In a simple spring model, a slowly varying support acceleration $a$ produces a relative displacement $x\approx -ma/k$, where $m$ is the mass and $k$ is the spring constant. Measuring a change of capacitance then measures that displacement. The ADXL335 uses suspended polysilicon structures and a differential capacitor to turn motion into an electrical signal.^[ref]

For an idealized pair of parallel-plate capacitors with equal area $A$ and gaps $g\mp x$, the capacitance difference isThis model explains why a small mechanical displacement can produce a signed electrical measurement; it is not a detailed model of every commercial MEMS geometry.