 Phase-shifting interferometry

Phase-shifting interferometry measures an optical phase difference by recording light intensities at controlled relative wave phase shifts. For two sufficiently coherent fields at one detector point, a common model iswhere $C$ is a common background, $A$ a modulation amplitude and ${\delta }_j$ a known applied step. Several measurements separate the unknown wave phase from light intensity background and contrast; a single bright or dark frame generally cannot do so.

A concrete primary implementation was reported in 1974. A piezoelectrically varied reference arm and a 1024-element photodiode array supplied sampled light intensities to a minicomputer, which recovered wave phase by synchronous Fourier-series detection. The paper describes optical-surface and lens testing, repeated sampling and compensation of instrumental wavefront errors.^[ref] This is an experimental implementation of controlled wave phase modulation; it is not a claim that every such system uses the same number of steps.

Writing the model asturns wave phase recovery into a linear fit followed by $\varphi =atan2(-D,B)$. The step choices must make the three columns $1,\cos {\delta }_j,\sin {\delta }_j$ independent. Repeating only the same wave phase cannot identify all three unknowns. With more steps, least squares can fit the coefficients while exposing model residuals.

A reflecting reference mirror moved axially by $\Delta z$ changes its round-trip optical path by $2\Delta z$ in the simple normal-incidence geometry, giving $\delta =4\pi \Delta z/\lambda$. A quarter-cycle wave phase step thus corresponds to $\Delta z=\lambda /8$; at 632.8 nm this is 79.1 nm. These are geometric model values, not a calibration result for the historical apparatus.

Phase-step calibration error, light intensity drift, motion between frames and detector nonlinearity can all break the common-intensity model. The retrieved wave phase remains modulo $2\pi$, so phase unwrapping requires additional spatial or temporal information. The useful observable is the relative wave phase under controlled acquisition conditions, not an absolute optical wave phase inferred from brightness alone.